Russell Low has sold ACLS and made no open-market buys since May 2020

Dr. Russell J. Low

President, CEO, and Director, Axcelis Technologies, Inc. (NASDAQ: ACLS)

Dr. Russell J. Low, Ph.D., has served as President, Chief Executive Officer, and Director of Axcelis Technologies, Inc. since May 11, 2023.( He joined Axcelis in October 2016 as Executive Vice President of Engineering, later advancing to Executive Vice President of Global Customer and Engineering Operations in January 2021.( During his tenure, Dr. Low played a key role in developing and launching the Purion ion implant product line, including the Purion Power Series.( As of 2026, his total compensation is approximately US$4.3 million, with direct ownership of 0.17% of the company's shares valued at $4.5 million.(

Prior to Axcelis, Dr. Low was Vice President of Engineering for Veeco Instruments' MOCVD Business Unit (2013–2016) and Senior Director of Engineering for its Molecular Beam Epitaxy Business Unit (2012–2013).( From 2003 to 2012, he held various positions at Varian Semiconductor Equipment Associates, culminating as Director of Technology.( Dr. Low holds a Ph.D. in Physical Chemistry from Oxford University, an Executive MBA from MIT, and a BS from Southampton University.( At 54 years old, he leads Axcelis, a provider of ion implantation equipment to major semiconductor manufacturers like Intel, TSMC, and Samsung.(

Written by Perplexity from public sources.